Protecting an interior of a hollow body with an ald coating
Patentne leiutis: Protecting an interior of a hollow body with an ald coating; Omanikud: Tartu Ülikool, Loodus- ja täppisteaduste valdkond, füüsika instituut, Tartu Ülikool, Loodus- ja täppisteaduste valdkond, keemia instituut; Autorid: Juhana Kostamo, Timo Malinen, Väino Sammelselg, Jaan Aarik, Lauri Aarik; Prioriteedi number: PCT/FI2014/050153; Prioriteedi kuupäev: 3.03.2014.
Patentne leiutis
Protecting an interior of a hollow body with an ald coating
An apparatus and method for protecting an interior of a hollow body (410), where an inlet and exhaust manifold comprising a port assembly attachable to an opening (41 1 ) of the hollow body is provided, the interior of the hollow body is exposed to sequential self- saturating surface reactions by sequential inlet of reactive gases via said port assembly and said opening into the interior of the hollow body, and excess gases is pumped via said opening and said port assembly out from the hollow body. Technical effects are: a conformal protective coating, coating only the inside of the hollow body and a reduced cleaning need of a surrounding chamber.
Publitseeritud ka kui: CN106062246A, EP3114249A1, US20170073807, WO2015132444A1
Prioriteeditaotlus
3.03.2014
PCT/FI2014/050153
Rahvusvaheline (IPC)
Inventor correction (RIN1) 08.03.2017
Rahvusvaheline
ESPANET OY
Soome Vabariik
Kaitstud