Influence of He/D2 plasma fluxes on tungsten coatings morphology and crystallinity

Piip, Kaarel; Paris, Peeter; Hakola, Antti; Bystrov, Kirill; Temmerman, Gregory De; Aints, Märt; Jõgi, Indrek; Kozlova, Jekaterina; Laan, Matti; Likonen, Jari; Lissovski, Aleksandr; Mändar, Hugo (2013). Influence of He/D2 plasma fluxes on tungsten coatings morphology and crystallinity. Book of Abstracts International Conference 21.-24. April 2013 Tartu, Estonia Functional Materials and Nanotechnologies: Conference FM&NT-2013; Tartu; 21.-24. aprill 2013.
publitseeritud konverentsiettekanne
Piip, Kaarel; Paris, Peeter; Hakola, Antti; Bystrov, Kirill; Temmerman, Gregory De; Aints, Märt; Jõgi, Indrek; Kozlova, Jekaterina; Laan, Matti; Likonen, Jari; Lissovski, Aleksandr; Mändar, Hugo
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Influence of He/D2 plasma fluxes on tungsten coatings morphology and crystallinity
Book of Abstracts International Conference 21.-24. April 2013 Tartu, Estonia Functional Materials and Nanotechnologies
Conference FM&NT-2013; Tartu; 21.-24. aprill 2013
2013
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

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