Atomic layer deposition of zirconium dioxide from zirconium tetraiodide and ozone

Kukli, Kaupo; Kemell, Marianna; Mizohata, Kenichiro; Vehkamäki, Marko; Kalam, Kristjan; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku (2018). Atomic layer deposition of zirconium dioxide from zirconium tetraiodide and ozone. ECS Journal of Solid State Science and Technology, 7, P1−P8.10.1149/2.0041802jss.
ajakirjaartikkel
Kukli, Kaupo; Kemell, Marianna; Mizohata, Kenichiro; Vehkamäki, Marko; Kalam, Kristjan; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku
  • Inglise
ECS Journal of Solid State Science and Technology
7
2018
P1P8
Ilmunud
1.1. Teadusartiklid, mis on kajastatud Web of Science andmebaasides Science Citation Index Expanded, Social Sciences Citation Index, Arts & Humanities Citation Index ja/või andmebaasis Scopus (v.a. kogumikud)
WOS

Viited terviktekstile

dx.doi.org/10.1149/2.0041802jss