Structural and electrical characterisation of high-k ZrO2 thin films deposited by chemical spray pyrolysis method.

Abayomi, O.; Oja-Acik, I.; Katerski, A.; Mere, A.; Krunks, M. (2018). Structural and electrical characterisation of high-k ZrO2 thin films deposited by chemical spray pyrolysis method. Thin Solid Films, 662, 129−136.10.1016/j.tsf.2018.07.035.
ajakirjaartikkel
Abayomi, O.; Oja-Acik, I.; Katerski, A.; Mere, A.; Krunks, M.
  • Inglise
Thin Solid Films
0040-6090
662
2018
129136
Ilmunud
1.1. Teadusartiklid, mis on kajastatud Web of Science andmebaasides Science Citation Index Expanded, Social Sciences Citation Index, Arts & Humanities Citation Index ja/või andmebaasis Scopus (v.a. kogumikud)
SCOPUS

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doi.org/10.1016/j.tsf.2018.07.035