Analysis of leakage current mechanisms in RuO2-TiO2-RuO2 MIM structures

Racko, J.; Mikolášek, M.; Harmatha, L.; Breza, J.; Hudec, B.; Fröhlich, K.; Aarik, J.; Tarre, A.; Granzner, R.; Schwierz, F. (2011). Analysis of leakage current mechanisms in RuO2-TiO2-RuO2 MIM structures. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 29 (1), 01AC08.10.1116/1.3534022.
ajakirjaartikkel
Racko, J.; Mikolášek, M.; Harmatha, L.; Breza, J.; Hudec, B.; Fröhlich, K.; Aarik, J.; Tarre, A.; Granzner, R.; Schwierz, F.
  • Inglise
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
1071-1023
29
1
2011
01AC08
Ilmunud
1.1. Teadusartiklid, mis on kajastatud Web of Science andmebaasides Science Citation Index Expanded, Social Sciences Citation Index, Arts & Humanities Citation Index ja/või andmebaasis Scopus (v.a. kogumikud)
WOS

Viited terviktekstile

dx.doi.org/10.1116/1.3534022

Lisainfo

Article
annealing, defect states, leakage currents, MIM structures, ruthenium compounds, titanium compounds, ruthenium oxide, titanium oxide, oxygen
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