Influence of growth temperature on properties of zirconium dioxide films grown by atomic layer deposition

Kukli, K.; Ritala, M.; Aarik, J.; Uustare, T.; Leskela, M. (2002). Influence of growth temperature on properties of zirconium dioxide films grown by atomic layer deposition. Journal of Applied Physics, 92 (4), 1833−1840.
ajakirjaartikkel
Kukli, K.; Ritala, M.; Aarik, J.; Uustare, T.; Leskela, M.
  • Inglise
Journal of Applied Physics
Amer Inst Physics
0021-8979
92
4
2002
18331840
8
Ilmunud
1.1. Teadusartiklid, mis on kajastatud Web of Science andmebaasides Science Citation Index Expanded, Social Sciences Citation Index, Arts & Humanities Citation Index ja/või andmebaasis Scopus (v.a. kogumikud)
WOS

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