Optical Properties of ZrO2 Thin Films Grown in Chloride-based Atomic Layer Deposition Process

Kasikov, Aarne; Mändar, Hugo; Sammelselg, Väino; Aarik, Jaan (2002). Optical Properties of ZrO2 Thin Films Grown in Chloride-based Atomic Layer Deposition Process. In: Eva Majkova, Stefan Luby (Ed.). Book of Abstracts. ICTF12. 12th International Conference on Thin Films (114).12th International Conference on Thin Films. Bratislava, 15.-20. september 2002. Bratislava: Institute of Physics, Slovak Academy of Sciences in VEDA, Publishing House of SAS.
muud
Kasikov, Aarne; Mändar, Hugo; Sammelselg, Väino; Aarik, Jaan
  • Inglise
Kloriidil baseeruva aatomkihtsadestusega kasvatatud õhukeste ZrO2 kilede optilised omadused
Book of Abstracts. ICTF12. 12th International Conference on Thin Films
Tartu Ülikool
Eva Majkova, Stefan Luby
12th International Conference on Thin Films. Bratislava, 15.-20. september 2002
Bratislava
Institute of Physics, Slovak Academy of Sciences in VEDA, Publishing House of SAS
80-2240737-2
2002
114
1
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

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