Optical emission spectroscopic measurements of gas temperature in inductive RF discharge

Paris, P.; Heikkinen, J. A.;Järvinen, J.; Tiitta, A. (2007). Optical emission spectroscopic measurements of gas temperature in inductive RF discharge. Proceeding of the XLI Annual Conference of the Finnish Physical Society: Annual Conference of the Finnish Physical Society; Tallinn; 15 -17 march 2007.. 284−284.
publitseeritud konverentsiettekanne
Paris, P.; Heikkinen, J. A.;Järvinen, J.; Tiitta, A.
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Optical emission spectroscopic measurements of gas temperature in inductive RF discharge
Proceeding of the XLI Annual Conference of the Finnish Physical Society
Annual Conference of the Finnish Physical Society; Tallinn; 15 -17 march 2007.
2007
284284
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

Viited terviktekstile

Lisainfo

SPectroscopy, RF discharge, Gas temperature