Atomic Layer Deposition of TiO2 on Sapphire: Effect of Substrate Orientation on Structure and Growth Rate of Thin Films

Möldre, Kristel; Aarik, Lauri; Tarre, Aivar; Mändar, Hugo; Aarik, Jaan (2014).
Atomic Layer Deposition of TiO2 on Sapphire: Effect of Substrate Orientation on Structure and Growth Rate of Thin Films
. Book of Abstracts Baltic ALD 2014: 12th International Baltic Conference on Atomic Layer Depostion; Helsinki, Finland; May 12-13, 2014. Ed. Leskelä, Markku; Ritala, Mikko; Härkönen, Emma. Univesity of Helsinki, Finland, 147.
publitseeritud konverentsiettekanne
Möldre, Kristel; Aarik, Lauri; Tarre, Aivar; Mändar, Hugo; Aarik, Jaan
  • Inglise
TiO2 aatomkihtsadestamine safiirile: aluse orientatsiooni mõju õhukeste kilede struktuurile ja kasvukiirusele
Atomic Layer Deposition of TiO2 on Sapphire: Effect of Substrate Orientation on Structure and Growth Rate of Thin Films
Book of Abstracts Baltic ALD 2014
Leskelä, Markku; Ritala, Mikko; Härkönen, Emma
12th International Baltic Conference on Atomic Layer Depostion; Helsinki, Finland; May 12-13, 2014
Univesity of Helsinki, Finland
2014
147
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

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