Transmission spectrometry vs. spectral ellipsometry: Bruggeman EMA layer revisited

Kasikov, Aarne; Aarik, Jaan; Mändar, Hugo (2012). Transmission spectrometry vs. spectral ellipsometry: Bruggeman EMA layer revisited. In: R.Brunner (Ed.). Progress in Applied Surface, Interface and Thin Film Science 2012. SURFINT-SREN III. May 14-18, 2012-04-27 Florence, Italy. EXTENDED ABSTRACT BOOK (45−46).Progress in Applied Surface, Interface and Thin Film Science 2012. SURFINT-SREN III. 14.-18.mai 2012, Firenze, Itaalia. Bratislava: Comenius University.
muud
Kasikov, Aarne; Aarik, Jaan; Mändar, Hugo
  • Inglise
Läbilaskvusspektromeetria spektraalse ellipsomeetria vastu: veel kord Bruggemani efektiivse keskkonna kihist
Progress in Applied Surface, Interface and Thin Film Science 2012. SURFINT-SREN III. May 14-18, 2012-04-27 Florence, Italy. EXTENDED ABSTRACT BOOK
Comenius University Bratislava
R.Brunner
Progress in Applied Surface, Interface and Thin Film Science 2012. SURFINT-SREN III. 14.-18.mai 2012, Firenze, Itaalia
Bratislava
Comenius University
976-80-223-3212-5
2012
4546
2
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

Viited terviktekstile

Lisainfo

ALD, ellipsomeetria, Al2O3, karedus, dispersioon