Atomic layer deposition of epitaxial Cr2O3 using bis(1,5-di-tert-butyl-1,2,5-triazapentadienyl)chromium(II) as chromium source

Roosalu, Kaspar; Aarik, Lauri; Rammula, Raul; Aarik, Jaan; Kalutarage, Lakmal, C; Winter, Charles, H; Mändar, Hugo (2014). Atomic layer deposition of epitaxial Cr2O3 using bis(1,5-di-tert-butyl-1,2,5-triazapentadienyl)chromium(II) as chromium source. Baltic ALD 2014, 12-13 mai, 2014 Helsinki, Soome.
publitseeritud konverentsiettekanne
Roosalu, Kaspar; Aarik, Lauri; Rammula, Raul; Aarik, Jaan; Kalutarage, Lakmal, C; Winter, Charles, H; Mändar, Hugo
  • Inglise
Atomic layer deposition of epitaxial Cr2O3 using bis(1,5-di-tert-butyl-1,2,5-triazapentadienyl)chromium(II) as chromium source
Atomic layer deposition of epitaxial Cr2O3 using bis(1,5-di-tert-butyl-1,2,5-triazapentadienyl)chromium(II) as chromium source
Baltic ALD 2014, 12-13 mai, 2014 Helsinki, Soome
2014
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

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