Cupric oxide thin films grown by atomic layer deposition

Tamm, Aile; Tarre, Aivar; Seemen, Helina; Kukli, Kaupo; Link, Joosep; Stern, Raivo. (2019). Cupric oxide thin films grown by atomic layer deposition. Euro CVD 22 - Baltic ALD 16, 2019, 1: EuroCVD 22 – Baltic ALD 16 | 2019, Luxembourg from 24 to 28 June 2019.. Euro CVD , 17.
publitseeritud konverentsiettekanne
Tamm, Aile; Tarre, Aivar; Seemen, Helina; Kukli, Kaupo; Link, Joosep; Stern, Raivo.
  • Inglise
Euro CVD 22 - Baltic ALD 16, 2019
EuroCVD 22 – Baltic ALD 16 | 2019, Luxembourg from 24 to 28 June 2019.
1
2019
17
Ilmunud
3.4. Artiklid/ettekanded, mis on avaldatud valdkonda 3.1. mittekuuluvates konverentsikogumikes