Atomic layer deposition of metal oxide nanolaminates exhibiting nonlinear electrical and magnetic polarization with tunable resistivity

Kukli, Kaupo; Kemell, Marianna; Heikkilä, Mikko J.; Seemen, Helina; Kalam, Kristjan; Tamm, Aile; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku (2019). Atomic layer deposition of metal oxide nanolaminates exhibiting nonlinear electrical and magnetic polarization with tunable resistivity. EuroCVD 22 - Baltic ALD 16 Conference, Luxembourg, 24-28 June 2019. LIST,.
publitseeritud konverentsiettekanne
Kukli, Kaupo; Kemell, Marianna; Heikkilä, Mikko J.; Seemen, Helina; Kalam, Kristjan; Tamm, Aile; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku
  • Inglise
EuroCVD 22 - Baltic ALD 16 Conference, Luxembourg, 24-28 June 2019
2019
Ilmunud
3.4. Artiklid/ettekanded, mis on avaldatud valdkonda 3.1. mittekuuluvates konverentsikogumikes

Seotud asutused

The University of Valladolid, Department of Electronics The University of Helsinki, Department of Chemistry