Raman characterization of Ru thin films grown by ALD

Niilisk, A.; Aidla, A.; Kukli, K.; Mändar, H.; Matisen, L.; Saar, A.; Aarik, J. (2010). Raman characterization of Ru thin films growwn by ALD. Conference Program & Abstract Booklet: Baltic ALD 2010 & GerALD 2010; Bucerius Law School, Hamburg, Germany, September 16-17, 2010. Hamburg, Germany, P36.
publitseeritud konverentsiettekanne
Niilisk, A.; Aidla, A.; Kukli, K.; Mändar, H.; Matisen, L.; Saar, A.; Aarik, J.
  • Inglise
Aatomkihtsadestamisega kasvatatud õhukeste Ru kilede raman-iseloomustus
Raman characterization of Ru thin films growwn by ALD
Conference Program & Abstract Booklet
Baltic ALD 2010 & GerALD 2010; Bucerius Law School, Hamburg, Germany, September 16-17, 2010
Hamburg, Germany
2010
P36
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

Viited terviktekstile

Lisainfo