Spectroscopic characterization of ZrO2 thin films grown by atomic layer deposition

Aarik, J.; Mändar, H.; Kirm, M. (2002). Spectroscopic characterization of ZrO2 thin films grown by atomic layer deposition. In: Rosental, A. (Ed.). The Fifth Baltic Symposium on Atomic Layer Deposition (BALD-5). Abstracts (26).The Fifth Baltic Symposium on Atomic Layer Deposition, Tartu, Estonia, October 24-26, 2002. Tartu: TÜ Kirjastus.
muud
Aarik, J.; Mändar, H.; Kirm, M.
  • Inglise
The Fifth Baltic Symposium on Atomic Layer Deposition (BALD-5). Abstracts
Rosental, A.
The Fifth Baltic Symposium on Atomic Layer Deposition, Tartu, Estonia, October 24-26, 2002
Tartu
TÜ Kirjastus
9985-4-0280-4
2002
26
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

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