Epitaxial growth of oxide thin films by atomic layer deposition

Aarik, Jaan; Mändar, Hugo; Tarre, Aivar; Uustare, Teet (2012). Epitaxial growth of oxide thin films by atomic layer deposition. Book of Abstracts: The 12th International Conference on Atomic Layer Deposition "AVS-ALD & Baltic ALD 2012", Dresden, Germany, June 17-20, 2012. Ed. Uwe Schröder and Mato Knez. Namlab gGmbH, Dresden, 160.
publitseeritud konverentsiettekanne
Aarik, Jaan; Mändar, Hugo; Tarre, Aivar; Uustare, Teet
  • Inglise
Õhukeste oksiidkilede epitaksiaalkasv aatomkihtsadestamisel
Book of Abstracts
Uwe Schröder and Mato Knez
The 12th International Conference on Atomic Layer Deposition "AVS-ALD & Baltic ALD 2012", Dresden, Germany, June 17-20, 2012
Namlab gGmbH, Dresden
2012
160
Ilmunud
5.2. Konverentsiteesid, mis ei kuulu valdkonda 5.1

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